UV Direct Write Metal Enhanced Redox (MER) Domain Engineering for Realization of Surface Acoustic Devices on Lithium Niobate
نویسندگان
چکیده
Dr. D. Yudistira, A. Boes, Prof. A. Mitchell School of Electrical and Computer Engineering RMIT University Melbourne , VIC 3001 , Australia E-mail: [email protected] A. R. Rezk, Prof. L. Y. Yeo Micro/Nanophysics Research Laboratory RMIT University Melbourne , VIC 3001 , Australia Prof. J. R. Friend Micro/Nanophysics Research Laboratory RMIT University, Melbourne VIC, 3001, Australia The Melbourne Centre for Nanofabrication Clayton , VIC 3166 , Australia
منابع مشابه
Self-assembled monolayer compatible with metal surface acoustic wave devices on lithium niobate.
The formation of a siloxane self-assembled monolayer (SAM) film on a lithium niobate substrate was investigated for surface acoustic wave (SAW) sensor devices for the detection of hydrogen. The most widely used SAM coupling reagent, octadecyltrichlorosilane, etches aluminum metal features that are integral to sensor devices, due to the formation of high local concentrations of hydrochloric acid...
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