Probe-Based Micro-Scale Manipulation and Assembly Using Force Feedback

Repeatable manipulation and assembly of micro-scale components is a critical capability for future developments in opto-electronics, hybrid microelectromechanical systems, and the integration of nano-scale devices into larger systems. This paper focuses on one particular part of this problem; the manipulation and assembly of microspheres using a single probe with force feedback. A sharp probe combined with a high precision positioning system is used to push microspheres into desired locations and configurations within a two-dimensional workspace. A description of this micromanipulation system is presented along with a discussion on the basic manipulation capabilities. Force feedback has been utilized in two ways. First, it is used to measure the interaction forces during micromanipulation for detecting collisions with particles and determining the forces necessary for successful manipulation. Second, a force control system for the vertical contact force has been developed for improved sensitivity during manipulation. In both cases, a piezoresistive silicon cantilever micro force sensor with an approximate force resolution of 10 N is used. Preliminary experimental results for the force control system and the measurement of manipulation contact forces are presented. 1 Join Salt La st