Batch Mode Micromanufacturing Based on Micro Electro-discharge Machining and Micro Ultrasonic Machining for Micro Electro Mechanical Systems (mems)

Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high uniformity to achieve high-throughput and high-precision micromachining. It has been demonstrated for potential applications that range from micro-gears to smart stents. Similarly, batch-mode micro ultrasonic machining provides lithographic manufacturing compatibility to micromachining hard ceramics and other dielectric materials, such as glass-mica ceramic, lead zirconate titanate (PZT), single-crystal quartz, ruby, etc. In this process, batch-μEDM is used to define a cutting tool with desired pattern, typically in stainless steel. This has been demonstrated for the batch fabrication of piezoelectric transducers for smart biopsy tools and structurally complex microresonators.