8.4: Current Temperature Stress Study of RF Sputter a-InGaZnO TFTs

نویسندگان

  • C. Chen
  • Charlene Chen
  • Katsumi Abe
  • Hideya Kumomi
  • Jerzy Kanicki
چکیده

Current temperature stress (CTS) measurements were performed on RF sputter amorphous In-Ga-Zn-O (a-InGaZnO) thin film transistors (TFTs). We investigated the effect of stress current (ISTR) and stress temperature (TSTR) on the electrical properties of the aInGaZnO TFTs when stressed in both the linear and saturation regimes.

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تاریخ انتشار 2008