Sputter Deposited Tin Oxide Thin Film Properties and Their Application for Radio Wave Propagation
نویسندگان
چکیده
A major disadvantage of energy saving glass using tin oxide (SnO2) thin film is that SnO2 attenuates the mobile signal from passing through it. In order to improve such signal transmission, a frequency selective surface (FSS) structures are designed on SnO2 thin film. In this paper, SnO2 thin film with FSS structure was fabricated using combination of printed circuit board technology and reactive magnetron sputtering deposition. SnO2 thin films were deposited at various rf discharge powers and O2 flow ratios and their physical, electrical and optical properties were analyzed. Experimental results reveal that the transmission of microwave signal improved with the reduction of SnO2 sheet resistance. The grain size of SnO2 thin film significantly influences the value of sheet resistance. The SnO2 sheet resistance was lower at larger grain size. Therefore, a clear correlation was found between SnO2 thin films properties and transmission of microwave signal through SnO2 coated glass with FSS structure. In addition, sufficient amount of O2 gas was required to deposit transparent and functional SnO2 thin film. Optimum condition to deposit SnO2 thin film for energy saving glass with improved microwave transmission has been demonstrated.
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