Frequency Scanned Interferometry for ILC Tracker Alignment

In this paper, we report high-precision absolute distance and vibration measurements performed with frequency scanned interferometry using a pair of single-mode optical fibers. Absolute distance was determined by counting the interference fringes produced while scanning the laser frequency. A high-finesse Fabry-Perot interferometer was used to determine frequency changes during scanning. Two multiple-distance-measurement analysis techniques were developed to improve distance precision and to extract the amplitude and frequency of vibrations. Under laboratory conditions, measurement precision of ∼ 50 nm was achieved for absolute distances ranging from 0.1 meters to 0.7 meters by using the first multiple-distance-measurement technique. The second analysis technique has the capability to measure vibration frequencies ranging from 0.1 Hz to 100 Hz with amplitude as small as a few nanometers, without a priori knowledge. A possible optical alignment system for a silicon tracker is also presented.