Advantages of Helium and Neon Ion Beams for Intelligent Imaging
نویسندگان
چکیده
Scanning electron microscopy (SEM) has become a crucial tool to visualize the exterior morphology and surface structures for samples in both biology and material science. Conventional SEMs are usually limited by relative low resolution and charging effects. Carbon or metal coating is required for insulator samples to minimize charging effects. However, the coating layer can sometimes obscure miniscule surface details and the coating procedure may generate artifacts, which could be confused with the true ultrastrcuture.
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