State-of-the-art of MEMS Technology for Design and Fabrication of Micro-Mirrors

This paper reports on the state-of-the-art of technologies for the design and fabrication of MEMS micro-mirrors. We discuss the major design issues, considerations, calculations and restrictions of micro mirrors. The materials employed for the reflective surfaces are described along with their properties. The materials used for the static and dynamic MEMS micro structures as well as the different configurations are also presented and summarized. The two most widely used techniques for actuation, namely, Electrostatic and Magnetic are presented along with the formulas, tables and curves used to design the movable structures. The different options of fabrication processes are presented and discussed. Finally, the applications of micro mirrors are described.