Supplemental Material: Extreme Monolayer-Selectivity of Hydrogen-Plasma Reactions with Graphene
نویسندگان
چکیده
Figure S1 shows a schematic of our furnace setup. See " Methods " section in main text for details. mass flow controllers supply gases plasma generator tube furnace pressure gauge access door exhaust rotary pump Figure S1: Experimental setup for sample processing.
منابع مشابه
Extreme monolayer-selectivity of hydrogen-plasma reactions with graphene.
We study the effect of remote hydrogen plasma on graphene deposited on SiO₂. We observe strong monolayer selectivity for reactions with plasma species, characterized by isotropic hole formation in the basal plane of monolayers and etching from the sheet edges. The areal density of etch pits on monolayers is 2 orders of magnitude higher than on bilayers or thicker sheets. For bilayer or thicker ...
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