Method for growing a diamond thin film on a substrate by plasma enhanced chemical vapor deposition
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Nitrogen incorporation and trace element analysis of nanocrystalline diamond thin films by secondary ion mass spectrometry
Nitrogen has been successfully incorporated into nanocrystalline diamond films produced by a CH4 /N2 microwave plasma-enhanced chemical vapor deposition method. High mass resolution secondary ion mass spectrometry ~SIMS! characterization shows that the density of the incorporated nitrogen, monitored via CN, can be as high as 10 atoms/cm, depending on the ratio of CH4 to N2 in the reactant gas a...
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