Silver Diffusion Bonding and Layer Transfer of Lithium Niobate to Silicon
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چکیده
In this chapter, we discuss a method of metallic bonding between two deposited silver layers. A diffusion bonding method has been developed that enables layer transfer of single crystal lithium niobate thin films onto silicon substrates. A silver film was deposited onto both the silicon and lithium niobate surfaces prior to bonding, and upon heating, a diffusion bond was formed. Transmission electron microscopy confirms the interface evolution via diffusion bonding which combines interfacial diffusion, power law creep and growth of (111) silver grains to replace the as-bonded interface by a single polycrystalline silver film. The layer transferred film, which was discussed in Chapters 3 and 5, had a composition that was the same as bulk lithium niobate. 1
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