Fabrication of Micro-Optical Devices Using Slow Tool Servo Diamond Turning Process
نویسنده
چکیده
Micro-optical devices, e.g., micro lenses, micro mirrors, play an important role in high speed data, voice and video signal transmissions. In this study, a new method of fabricating micro optical devices was investigated. The method is different from traditional fabrication processes in the sense that that the micro optical elements were simultaneously machined in a process known as slow tool servo (STS) machining.
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