Micro-Robot Leg Design for SMART DUST using Improved Inchworm Motor
نویسندگان
چکیده
This paper discusses the design of micro-robot legs based on the skiing principle using an improved version of the inchworm motors for the SMART DUST program. Four inchworm motors are attached to each of the two parallel sides of a SMART DUST mote to serve as the ski legs and support legs for the dust mote. The ski legs push the micro-robot at 75° from the surface and are capable of moving a micro-robot with maximum mass of 12.3mg by 40μm per ski cycle. Each inchworm motor measures 1000μm x 250μm x 150μm and has a minimum force density (at max shuttle displacement) of 129μN/mm at 33V. This translates to a payload of 130 times its own weight. The force density at zero shuttle displacement is 206μN/mm. The average work done per inchworm cycle is 3.66nJ with an efficiency of 36%. The maximum shuttle displacement is 96μm. The micro robot legs are designed based on the 2-poly SOI process (Iolanthe Process) available at UC Berkeley.
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