Identification of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems

In this study the dynamic behaviour of perforated microplates oscillating under the effect of squeeze film damping is analyzed. A numerical approach is adopted to predict the effects of damping and stiffness transferred from the surrounding ambient air to oscillating structures; the effect of hole’s cross section and plate’s extension is observed. Results obtained by F.E.M. models are compared with experimental measurements performed by an optical interferometric microscope.