EMC’04/Sendai RF ITEGRATED NOISE SUPPRESSOR ON CPW USING FERROMAGNETIC RESONANCE AND EDDY CURRENT LOSS

The RF integrated noise suppressor is demonstrated by integration of soft magnetic films on coplanar transmission line. Vertical structure is composed of the magnetic film (2 mm x 15 mm x 1, 2 m) /2 m-thick polyimide/15.2 mm-long and 3 mthick Cu transmission line/seed layer (Ti/Cu) /1 mm-thick glass substrate. The coplanar transmission line was prepared by electroplated Cu with 50 characteristic impedance. The width of signal line is 50 m. The magnetic films were deposited by rf magnetron sputtering. We used CoPdAlO (4 Ms=8.3 kG, = 500 cm, FMR frequency fres=2.8 GHz) and CoNbZr (4 Ms=10 kG, =120 cm, fres=0.8 GHz) magnetic films. The measured transmission parameter (S21) of integrated noise suppressor was compared with those of the non-integrated noise suppressor. The magnitude of signal attenuation due to the ferromagnetic resonance and eddy current loss of magnetic films at resonance point was greatly increased by the integration: from -4 dB to -30 dB for the 1 m-thick CoNbZr film, and from -15 dB to -57 dB for the 2 m-thick CoPdAlO film, respectively.