SEGS: On-line WWW Wet Etch Simulator

نویسندگان

  • Gang Li
  • Ted Hubbard
  • Erik K. Antonsson
چکیده

This paper presents an interactive on-line wet etch simulator (SEGS) which predicts the etched shape as a function of time for arbitrary isotropic or anisotropic etchants and any initial mask shape. Using any Java-enabled web browser users can draw initial masks, choose the etchant, simulate the etching, and view animation results. SEGS can be accessed at http://mira.me.tuns.ca/

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تاریخ انتشار 1998