High-temperature hydrogen anneal of mnos structures
نویسندگان
چکیده
2014 The effects on fast surface state density due to high-temperature hydrogen anneals through windows in the silicon nitride layer next to the active MNOS regions are presented. A marked geometry effect is observed as a result of the occurring lateral hydrogen diffusion mechanism. Besides this lateral diffusion process, a vertical hydrogen diffusion through the nitride layer is observed at temperatures above 850 °C. REVUE DE PHYSIQUE APPLIQUÉE T
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