Phase matched second harmonic generation in silicon [Oxy]nitride-calix[4]arene waveguides - Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on

width of less than or equal to 8 pm operate in a single mode, but the waveguides with a core width of more than 8 pm operate in multiple modes. Figure 3 shows the dependence of optical loss on core width. The optical loss is constant for TE polarized incident light, even though the core width increases. On the other hand, the optical loss decreases with increasing core width for TM polarized incident light. The lowest optical loss at 1.3 pm among the waveguides which operate in a single mode was when the core width was 8 pm; the values were 0.4 dB/cm for TE and 0.7 dB/cm for TM polarized incident lights. In conclusion, we showed that embedded channel waveguides can be fabricated by direct electron beam writing. By controlling conditions appropriately, we can get single mode transmission and low optical loss. *NTT Opto-electronics Laboratories, 9-11, Midori-cho 3-chome Musashino-shi, Tokyo 180 Japan