Integrated Microfluidic Devices Based on Low-Temperature Co- Fired Ceramic (LTCC) Technology
نویسندگان
چکیده
This paper reviews recent developments in integrated fluidic mesosystems, based on low-temperature co-fired ceramic (LTCC) technology, in this laboratory and elsewhere. LTCC is shown to be an advantageous technique for integrated fluidic systems, due to its simplicity, low cost and ease of integration with other technologies and components (silicon, polymer, circuit boards. Also, the techniques utilized in making the structures are presented.
منابع مشابه
Dynamic Passivation with BSA Overcomes LTCC Mediated Inhibition of PCR
The increasing use of low temperature co-fired ceramic (LTCC) for the fabrication of biological microfluidic devices necessitates further research on LTCC biocompatibility. In this study we explore the inhibitory effect of DuPont’s 951 LTCC on Polymerase Chain Reaction (PCR), and demonstrate a novel mechanism to increase biocompatibility between LTCC and PCR with the addition of a common passiv...
متن کاملTechnology and applications of Low Temperature Cofired Ceramic (LTCC) based sensors and microsystems
The paper presents general information on LTCC materials, manufacturing processes and properties of fired modules. A Multichip Module package has been the main application of Low Temperature Cofired Ceramic (LTCC) technology. Recently, this technology is also used for production of sensors, actuators and microsystems. The research and development on the LTCC sensors and microsystems carried out...
متن کاملExploitation of Ltcc Qualities in Gas Sensors Application
In this contribution we deal with technology potential of the low temperature co-fired ceramic (LTCC) in association with design, development and production of organometallic thick film gas sensors. Customer demands to the gas sensors array and to the joint construction of the sensing part with evaluating ASIC led to the exploitation of LTCC potential in the production technology. The presented...
متن کاملContactless Conductivity Detection in Ceramic Technology for On-Chip Electrophoresis
A capacitively coupled contactless conductivity detector produced in Low Temperature Co-fired Ceramic (LTCC) technology for microchip capillary electrophoresis (CE) is reported in this work. Electrodes located outside the measurement channel are used to sense impedance variations caused by conductive ions. The application of LTCC in combination with contactless conductivity detection is very pr...
متن کاملIntegrated SMD pressure / flow / temperature multisensor for compressed air in LTCC technology: Thermal flow sensor
In this work, we present and analyse the flow-sensing part of a recently-developed multisensor in LTCC (lowtemperature co-fired ceramic) technology; this device integrates flow / pressure / temperature sensing and is designed for diagnostics monitoring of standard industrial compressed air circuits and devices such as valves and actuators. In this prototype, flow is sensed using the constant-te...
متن کامل