Role of Electrochemical Reactions in the Degradation Mechanisms of AlGaN/GaN HEMTs

نویسندگان

  • Feng Gao
  • Carl V Thompson
  • Jesús del Alamo
  • Tomás Palacios
چکیده

The nature of structural degradation in AlGaN/GaN high electron mobility transistors (HEMTs) are investigated in this work. Moisture from the environment and/or adsorbed water on the III-N surface were found to play an important role in the formation of surface pits during OFF-state electrical stress. The mechanism of this water-related structural degradation is explained by an electrochemical cell formed at the gate edge where gate metal, the III-N surface and the passivation layer meet.

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تاریخ انتشار 2014