Lithography-free fabrication of carbon nanotube network transistors.

نویسندگان

  • Marina Y Timmermans
  • Kestutis Grigoras
  • Albert G Nasibulin
  • Ville Hurskainen
  • Sami Franssila
  • Vladimir Ermolov
  • Esko I Kauppinen
چکیده

A novel non-lithographic technique for the fabrication of carbon nanotube thin film transistors is presented. The whole transistor fabrication process requires only one mask which is used both to pattern transistor channels based on aerosol synthesized carbon nanotubes and to deposit electrodes by metal evaporation at different angles. An important effect of electrodynamic focusing was utilized for the directed assembly of transistor channels with feature sizes smaller than the mask openings. This dry non-lithographic method opens up new avenues for device fabrication especially for low cost flexible and transparent electronics.

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عنوان ژورنال:
  • Nanotechnology

دوره 22 6  شماره 

صفحات  -

تاریخ انتشار 2011