Flexible Mems: A Novel Technology To Fabricate Flexible Sensors And Electronics
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چکیده
FLEXIBLE MEMS DEVICES:A NOVEL TECHNOLOGY TO FABRICATE FLEXIBLE ELECTRONICSby
منابع مشابه
Flexible surface acoustic wave resonators built on disposable plastic film for electronics and lab-on-a-chip applications
Flexible electronics are a very promising technology for various applications. Several types of flexible devices have been developed, but there has been limited research on flexible electromechanical systems (MEMS). Surface acoustic wave (SAW) devices are not only an essential electronic device, but also are the building blocks for sensors and MEMS. Here we report a method of making flexible SA...
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