Numerical simulation - an important tool for industrial processing of bulk semiconductor crystals

نویسنده

  • A. Seidl
چکیده

In this paper, the benefit of numerical simulation for the development of a special crystal growth technique for the processing of silicon wafers for photovoltaic applications on an industrial scale is demonstrated, as an example for the importance of numerical simulation for industrial processing of bulk semiconductor crystals in general. Depending on the complexity of the problems to be treated, 2D and 3D modeling of heat flow, temperature distribution, mass transfer, gas and melt flow are treated, and their impact on stress and plastic deformation are examined.

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تاریخ انتشار 2008