Modeling and Design Optimization of a Cmos Compatible Mems
نویسندگان
چکیده
Silicon etching at low temperature offers the possibility of manufacturing monolithic sensors with associated electronics. For a given technology, the so-called FSBM, we have established a set of relations to describe the mechanical behavior of an elementary device, the cantilever beam. We have then used these relationships for the performance evaluation and optimization of a magnetic field sensor based on the Lorentz force actuation of a « Ushape » cantilever beam.
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