An Improved Monte Carlo Algorithm for Elastic Electron Backscattering from Surfaces

The problen of the backscattering of electrons from metal targets is subject of extensive theoreticel and experimental work in surface analysis. We are interested in the angular distribution of the backscattered electrons. The flow of electrons satisfies an integral equation, which might be solved by Monte Carlo methods. The Monte Carlo approach, used by A.Dubus, A. Jablonski and S.Tougaard in their paper “Evaluation of theoretical models for elastic electron backscattering from surfaces” (1999), is based upon direct simulation of the physical process. We introduce different weights in the Monte Carlo algorithm, which decrease the variance. We also introduce artificial absorption probability and demonstrate significant improvements in the efficiency of the algorithm. Results of extensive numerical tests are presented.