Application of MEMS in Turbomachinery Environment

MEMS are regarded to be an enabling technology allowing the development of smart products by augmenting the computational ability of microelectronics with the perception and control capabilities of micro-sensors and micro-actuators. MEMS technology makes possible the integration of microelectronics with active perception and control functions, thereby, greatly expanding the design and application space. Thus MEMS are expected to be an enabling technology for future smart engine concepts in the Aero-Engine industry. Nevertheless, in the present state there are restrictions in the application of these devices in the harsh engine environment, which have to be overcome in order to take advantage of MEMS. The presented paper will give an overview about potential fields of application for MEMS in Aero-Engine applications. The main goal of the paper is to identify those applications which offer technological benefits which can not be achieved with common technology and – derived from this – to show the necessary steps in future development of MEMS. It also should trigger a discussion about the applicability of MEMS devices in harsh environment. Application of MEMS in Turbomachinery Environment UNCLASSIFIED/UNLIMITED 56 2 RTO-MP-104 UNCLASSIFIED/UNLIMITED