A Mixed-Signal Low-Noise Sigma-Delta Interface IC for Integrated Sub-Micro-Gravity Capacitive SOI Accelerometers
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چکیده
منابع مشابه
Micro-gravity capacitive silicon-on-insulator accelerometers
In this paper, the implementation and characterization of high-sensitivity in-plane capacitive micro-gravity silicon-on-insulator (SOI) accelerometers with the readout circuitry are presented. The devices were implemented in 50 μm thick SOI substrates using a two-mask dry-release process. The fabricated accelerometers were interfaced to a low-noise low-power reference-capacitor-less switched-ca...
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