A microelectromechanical system for thermomechanical testing of nanostructures
نویسندگان
چکیده
منابع مشابه
An electromechanical material testing system for in situ electron microscopy and applications.
We report the development of a material testing system for in situ electron microscopy (EM) mechanical testing of nanostructures. The testing system consists of an actuator and a load sensor fabricated by means of surface micromachining. This previously undescribed nanoscale material testing system makes possible continuous observation of the specimen deformation and failure with subnanometer r...
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