Composition and chemical bonding of pulsed laser deposited carbon nitride thin films
نویسندگان
چکیده
We studied composition, structure, and growth parameters of amorphous diamond-like carbon ~DLC! and carbon nitride (CNx) films deposited by pulsed laser deposition in vacuum and in nitrogen atmosphere. The composition (0<N/C<0.4), the structural and the electronic properties of the deposited carbon and carbon nitride films were investigated for different laser fluences ~1–12 J/cm!. Electron energy loss spectroscopy, x-ray photoelectron spectroscopy, and micro-Raman spectroscopy indicated an increase in sp-bonded carbon sites in the DLC films and an increase in N-sp C bonded sites in the CNx films with increasing deposition laser fluence. Raman spectroscopy also showed the presence of a small amount of CwN bonds in the CNx films. Furthermore, we observed that keeping the nitrogen pressure constant (P5100 mTorr! the increase in the deposition laser fluence is reflected by an increase in the nitrogen content in the films. All the results have been discussed in the framework of different theoretical models. © 2000 American Institute of Physics. @S0021-8979~00!08120-2#
منابع مشابه
Growth and Properties of Carbon Nitride Thin Films
Recent research on carbon nitride thin films grown using pulsed laser deposition combined with atomic beam techniques is reviewed. The composition, growth mechanism and phases of these films have been systematically investigated. The nitrogen composition was found to increase to a limiting value of 50% as the fluence was decreased for laser ablation at both 532 nm and 248 nm wavelengths. Time o...
متن کاملBoron nitride thin films deposited by RF plasma reactive pulsed laser ablation as interlayer between WC–Co hard metals and CVD diamond films
Thin films of boron nitride have been obtained by reactive pulsed laser ablation of a boron target in the presence of a 13.56 MHz radio frequency nitrogen plasma. The films have been deposited at several substrate temperatures, using the on-axis configuration, on WC–Co cutting tools, after Co removal by chemical etching (HClyHNO or HFyHNO ). Diamond polycrystalline 3 3 films of increasing thick...
متن کاملCarbon nitride materials synthesized by Ion-assisted pulsed laser deposition
Synthesis of carbon nitride has been an important topic in materials science since 1993. Ion-assisted pulsed laser deposition is proven to be a good method to deposit carbon nitride thin films. Both amorphous and crystal -C3N4 layers can be deposited on many substrates. A standard experimental set-up comprises a pulsed KrF excimer laser (wavelength 248 nm, duration ∼30 ns) that is used to ablat...
متن کاملPreparation and Characterization of Aluminum Nitride Thin Films with the Potential Application in Electro-Acoustic Devices
In this work, aluminum nitride (AlN) thin films with different thicknesses were deposited on quartz and silicon substrates using single ion beam sputtering technique. The physical and chemical properties of prepared films were investigated by different characterization technique. X-ray diffraction (XRD) spectra revealed that all of the deposited films have an amorphous str...
متن کاملThickness Influence on In Vitro Biocompatibility of Titanium Nitride Thin Films Synthesized by Pulsed Laser Deposition
We report a study on the biocompatibility vs. thickness in the case of titanium nitride (TiN) films synthesized on 410 medical grade stainless steel substrates by pulsed laser deposition. The films were grown in a nitrogen atmosphere, and their in vitro cytotoxicity was assessed according to ISO 10993-5 [1]. Extensive physical-chemical analyses have been carried out on the deposited structures ...
متن کامل