electrostatic coaxial cylindrical spectrometer for sputtering ion measurements
نویسندگان
چکیده
A 127 o electrostatic coaxial cylindrical energy spectrometer with a radial position sensitive MCP detector is designed and constructed. Beyond the traditional step-by-step voltage scanning method, this spectrometer is able to measure a segment of energy spectra at a working voltage. Therefore, the experiment efficiency is notably enhanced and it is suitable for measuring the energy spectra of sputtering ions. The first test was done by measuring an energy spectrum of the sputtering ions in 800keV Ar 8+ bombarding on beryllium target. Keyword: electrostatic coaxial cylinder spectrometer, radial position sensitive, sputtering ions energy spectrum
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