UHV Arc Deposition of Superconducting Niobium Films

Recently the UHV arc technology was proposed as a possible alternative for depositing thin superconducting films of pure niobium on the inside surface of RF cavities for particle accelerators. The paper describes status of research on deposition of superconducting films for RF accelerating cavities. New UHV arc based devices with planar and cylindrical niobium cathodes are presented. The main results and characteristics of arc deposited thin superconducting niobium films as well as the progress obtained recently in formation such films are also shown. Contribution to the 5 International Symposium on Applied Plasma Science, Hawaii, USA Work supported by the European Community-Research Infrastructure Activity under the FP6 “Structuring the European Research Area” programme (CARE, contract number RII3-CT2003-506395). EU contract number RII3CT-2003-506395 CARE Conf-05-019-SRF