Discharge technology for excimer lasers of high average power
نویسندگان
چکیده
The self-sustained discharge of excimers is analyzed. Several excitation schemes that have been successfully applied are compared. For high repetition rate operation not only the discharge stability and its efficiency are important selection criteria but more important is the potential of fast discharge switching with minimum pulse energy. Pulse compression plays a key role in the laser performance. A technology for low energy compression is described.
منابع مشابه
History and future prospects of excimer laser technology
We give a review about the historical development and various technological achievements in the field of excimer lasers since their discovery in 1970. The first commercial excimer laser model in the world, the EMG 500 from Lambda Physik was operating at maximum repetition rates of only 20Hz, whereas today multi kiloHz excimer lasers as the NovaLine lasers are available. In 2000 Lambda Physik in...
متن کامل3.A Measuring Chemically Induced Optical Degradation in Dielectric Thin Films
Plasma-induced etching of dielectric thin films is widely used in ~ntegratedcircuit preparation technology. It normally involves the interaction of gas discharge species with a thin-film surface in order to produce volat~le reaction products. The ultimate goal is to etch through a frlm in a spatially selective manner and to thereby generate a desired pattern. This process also occurs unintentio...
متن کاملA Long Pulse Discharge Excited ArF Laser
An X-ray preionised, discharge excited ArF excimer laser, = 193 nm, has been studied in the long pulse regime. The laser performance is found to be primarily dependent on the discharge stability, and therefore, on the gas composition, preionization timing and the pumping power. Using X-ray preionization and prepulse-mainpulse excitation, laser pulselengths of up to 120-ns full-width at half-max...
متن کاملTheoretical Studies of Electrical Characteristics of the Nitrogen Laser
A theoretical analysis of the circuits for a nitrogen laser driven by the Blumlein or capacitor charge transfer transmission line is given in detail. The electrical characteristics of the charge line for a special case of resonant charging are discussed and the effects of various parameters on voltage and current are investigated. By using MICRO-CAP software the transient behavior of the curren...
متن کامللیزر در دندانپزشکی ترمیمی
Today laser has a lot of usage in medicine and dentistry. In the field of dentistry, laser is used in soft tissue surgery, sterilization of canals (in root canal therapy) and in restorative dentistry laser is used for cavity preparation, caries removal, sealing the grooves (in preventive dentistry), etching enamel and dentin, composite polymerization and removal of tooth sensitivity. The use of...
متن کامل