Photolithography Challenges for the Micromachining Industry

Micromachining can be considered a fabrication technology for building devices with feature sizes from a few microns to a few mils, often with moving parts. MicroeElectroMechemical Systems (MEMS) is a term often used interchangeably with micromachining. MEMS devices, however, are distinguished from micromachining by their mechanical nature, because moving parts are often a required component to enable them to sense or manipulate the external environment.