Epitaxial relationship in the AlNÕSi„001... heterosystem
نویسندگان
چکیده
The epitaxial growth of crystalline wurtzite AlN thin films on ~001! Si substrates by plasma-assisted molecular-beam epitaxy is reported. The nucleation and the growth dynamics have been studied in situ by reflection high-energy electron diffraction. Cross-sectional transmission electron microscopy and x-ray diffraction investigations revealed a two-domain film structure (AlN and AlN! with a 30° rotation between neighboring domain orientations and an epitaxial orientation relationship of @0001#AlNi@001#Si and ^011̄0&AlNi^2̄110&AlNi@110#Si. A model for the nucleation and growth mechanism of 2H–AlN layers on Si~001! is proposed. © 2000 American Institute of Physics. @S0003-6951~00!03915-2#
منابع مشابه
Comparative STM and RHEED studies of Ge/Si(001) and Si/Ge/Si(001) surfaces
Although epitaxial growth has been traditionally monitored by reciprocal space techniques, such as reflection highenergy electron diffraction (RHEED), the development of surface-sensitive imaging techniques, such as scanning tunneling microscopy (STM), allows for monitoring in the real-space. RHEED averages information over relatively large sample regions, and is thus more representative of the...
متن کاملControl of epitaxial relationships of ZnO/SrTiO3 heterointerfaces by etching the substrate surface
Wurtzite ZnO thin films with different epitaxial relationships are obtained on as-received and etched (001), (011), and (111) SrTiO3 (STO) by metal-organic chemical vapor deposition (MOCVD). ZnO films exhibit nonpolar (1120) orientation with in-plane orientation relationship of <0001>ZnO//<110>STO on as-received (001) STO, and polar c-axis growth with <1100>ZnO//<110>STO on etched (001) STO sub...
متن کاملEPITAXIAL GROWTH OF Pt ( 001 ) THIN FILMS ONMgO ( 001 ) UNDER OXIDIZING CONDITIONS
Epitaxial Pt(001) thin films have been grown on MgO(001) substrates using dc magnetron sputtering with an Ar/0 2 mixture at 700'C. The width (FWHM) of the rocking curve of the Pt(002) peak is between 0.160 and 0.200, which is only 0.05' wider than that of the MgO (002) peak of the cleaved substrate. The film surface roughness is about 1 nm (rms) for a 240 nm thick Pt film. No grain structure co...
متن کاملEpitaxial Structure of (001)- and (111)-Oriented Perovskite Ferrate Films Grown by Pulsed-Laser Deposition
The epitaxial structures of SrFeO(2.5) films grown on SrTiO(3) (001) and (111) substrates by PLD are reported. A layer-by-layer growth mode was achieved in the initial stage on both substrates. The films were stabilized with a monoclinic structure, where we identified the in-plane domain structures and orientation relationship. Our study presents a guide to control the heteroepitaxy of (111)-or...
متن کاملBand gap in epitaxial NaCl-structure CrN„001... layers
B1–NaCl-structure CrN~001! layers were grown on MgO~001! at 600 °C by ultrahigh vacuum reactive magnetron sputter deposition in pure N2 discharges. X-ray diffraction analyses establish the epitaxial relationship as cube-on-cube, (001)CrNi(001)MgO with @100#CrNi@100#MgO , while temperature-dependent measurements show that the previously reported phase transition to the orthorhombic Pnma structur...
متن کامل