Suspended gate silicon nanodot memory
نویسنده
چکیده
This paper proposes a new non-volatile semiconductor memory which features a suspended gate integrated with silicon nanocrystals dots as a floating gate and the MOSFET as a readout. Performing three-dimensional finite element simulations combined with an analytical plate-capacitor model, we clarify the pull-in/pull-out operation of the suspended gate. We also show the dependence of the hysteresis cycle characteristics on material and structural parameters.
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