Lithographic deposition of patterned metal-organic framework coatings using a photobase generator.

A Low Temperature Fully Lithographic Process For Metal–Oxide Field-Effect Transistors

We report a low temperature C lithographic method for fabricating hybrid metal oxide/organic field-effect transistors (FETs) that combine a zinc–indium–oxide (ZIO) semiconductor channel and organic, parylene, dielectric layer. The transistors show a field-effect mobility of 12 0.8 cm V s , on/off ratio of 10 and turn-off voltage of V. This work demonstrates that organic and inorganic layers can...

Decorative Titanium Nitride Colored Coatings on Bell-Metal by Reactive Cylindrical Magnetron Sputtering

The transition metal nitrides like titanium nitride exhibit very interesting color variation properties depending on the different plasma deposition conditions using cylindrical magnetron sputtering method. It is found in this deposition study that nitrogen partial pressure in the reactive gas discharge environment plays a significant role on the color variation of the film coatings on bell-met...

Design and synthesis of a photoaromatization-based two-stage photobase generator for pitch division lithography.

The synthesis of a two-stage photobase generator (PBG) based on photoinduced aromatization is described. This material was designed for use in resolution-enhanced photolithography. Computer modeling predicts that a delay in the onset of base generation can lead to improved image quality. This delay can be realized by a PBG that must undergo two sequential photoreactions for each molecule of bas...

SiC coatings grown by liquid injection chemical vapor deposition using single source metal-organic precursors

In this paper, the effect of nanocatalytic metal-organic framework based on copper metal and bis-tetrazolamine (CuBTA) ligand functionalized with cobalt (II) oxide nanoparticles on the thermal decomposition behavior of ammonium perchlorate (AP), using differential survey calorimetry (DSC) has been reviewed. First, the metal-organic framework (CuBTA) was synthesized from the raw materials of cop...