Si wafer bonded of a-Si/a-SiNx distributed Bragg reflectors for 1.55-m wavelength vertical cavity surface emitting lasers

نویسندگان

  • Christophe Levallois
  • Alain Le Corre
  • Slimane Loualiche
  • Olivier Dehaese
  • Hervé Folliot
  • Cyril Paranthoen
  • Françoise Thoumyre
  • Christophe Labbé
  • C. Levallois
  • A. Le Corre
  • S. Loualiche
  • O. Dehaese
  • H. Folliot
  • C. Paranthoen
  • F. Thoumyre
چکیده

HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d’enseignement et de recherche français ou étrangers, des laboratoires publics ou privés. Si wafer bonded of a-Si/a-SiNx distributed Bragg reflectors for 1.55-μm wavelength vertical cavity surface emitting lasers Christophe Levallois, Alain Le Corre, Slimane Loualiche, Olivier Dehaese, Hervé Folliot, Cyril Paranthoen, Françoise Thoumyre, Christophe Labbé

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تاریخ انتشار 2017