Focused ion beam sample preparation for atom probe tomography
نویسندگان
چکیده
Atom Probe (AP) tomography is maturing into a routine method for the atomic resolution compositional analysis of metals, semiconductors and some polymers. This is often combined with a Transmission Electron Microscope (TEM) analysis of the same region of interest. The Focused Ion Beam (FIB) microscope has evolved as an essential tool for site and orientation specific sample preparation for such analysis. We review existing FIB-based AP/TEM sample preparation techniques and present a number of innovative approaches to specimen preparation illustrated with examples including a silicon-on-insulator semiconductor device, a twin boundary in a Cu-Bi alloy and a crystalline precipitate phase in a bulk metallic glass.
منابع مشابه
Preparation of nanowire specimens for laser-assisted atom probe tomography.
The availability of reliable and well-engineered commercial instruments and data analysis software has led to development in recent years of robust and ergonomic atom-probe tomographs. Indeed, atom-probe tomography (APT) is now being applied to a broader range of materials classes that involve highly important scientific and technological problems in materials science and engineering. Dual-beam...
متن کاملSpecimen preparation for correlating transmission electron microscopy and atom probe tomography of mesoscale features.
Atom-probe tomography (APT) provides atomic-scale spatial and compositional resolution that is ideally suited for the analysis of grain boundaries. The small sample volume analyzed in APT presents, however, a challenge for capturing mesoscale features, such as grain boundaries. A new site-specific method utilizing transmission electron microscopy (TEM) for the precise selection and isolation of...
متن کاملA Focused Ion Beam Specimen Preparation Method to Minimize Gallium Ion Concentration in Copper Atom-Probe Tomography Specimen Tips
Atom-probe tomography (APT) is a quantitative technique that permits three-dimensional (3-D) spectroscopic characterization of interfaces and other nanometer-scale features within a material. Specimens for atom-probe tomography (APT) analysis of semiconductor devices and nanostructured materials are typically fabricated employing a focused ion beam (FIB) instrument [1 3] or a dual-beam FIB inst...
متن کاملProgress of Three-dimensional Atom Probe Techniques for Analysis of Steel Materials —Development of Atom Probe Specimen Preparation Techniques for Site-specific Regions—
Three-dimensional atom probe (3DAP) is a very powerful tool which can investigate atomic positions of all alloying elements in steel with lattice-spacing spatial resolution. However, the very small analysis volume of 3DAP has limited its application field. To meet the needs for atomic-scale analyses of steel materials, advanced preparation techniques of a needle specimen tip including a site-sp...
متن کاملCombining structural and chemical information at the nanometer scale by correlative transmission electron microscopy and atom probe tomography.
In many cases, the three-dimensional reconstructions from atom probe tomography (APT) are not sufficiently accurate to resolve crystallographic features such as lattice planes, shear bands, stacking faults, dislocations or grain boundaries. Hence, correlative crystallographic characterization is required in addition to APT at the exact same location of the specimen. Also, for the site-specific ...
متن کامل