Automated Digital Circuits Design Based on Single-Grain Si TFTs Fabricated Through μ-Czochralski (Grain Filter) Process
نویسندگان
چکیده
W. Fang, A. van Genderen, R. Ishihara, R. Vikas, N. Karaki*, Y. Hiroschima*, S. Inoue*, T. Shimoda*, J. W. Metselaar and C. I. M. Beenakker Delft Institute of Microelectonics and Submicrontechnology (DIMES) Delft Univ. of Technol. Feldmannweg 17, POBox 5053, 2600 GB Delft, The Netherlands *Technology Platform Research Center, Seiko-Epson Corp., Nagano, Japan Tel: +31 15 2788498, Fax: +31 15 2622163 e-mail: r. [email protected]
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