Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film
نویسندگان
چکیده
electrode Ta–C–N library film K.-S. Chang, M. L. Green, I. Levin, J. R. Hattrick-Simpers, C. Jaye, D. A. Fischer, I. Takeuchi, and S. De Gendt National Institute of Standards and Technology (NIST), Gaithersburg, Maryland 20899, USA Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, USA IMEC, Kapeldreef 75, B-3001 Leuven, Belgium and Department of Chemistry, KU Leuven, 3000 Leuven, Belgium
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