MEMS for Optical Functionality

We discuss key features of MEMS technology which enable new functionalities of microphotonic devices, that can by summarized as “arrayability”, i.e. the ability to make massively parallel optical devices in a small form factor, “reconfigurability,” the ability to change optical properties spatially and temporaly, and “nano positioning,” the ability to position micro-scale devices with nanometer accuracy. We present an overview of cases where a combination of these features has led to commercial successes by creating new optical functionalities, and discuss materials-related challenges and future trends for optical MEMS research and commercialization.