Why Higher Resistivity Wafers
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چکیده
Normal silicon wafer substrate resistivity ranges for CMOS technologies have typically spanned from a low of about 5 mohm-cm on heavily doped epi substrates to a high of around 30 ohm-cm on polished wafers. Although heavily doped substrates have proven useful for protection against latch-up, digital CMOS device design and performance has not been strongly coupled directly to substrate resistivity. This is changing in the emerging area of CMOS integration of radio frequency transceiver devices operating in the GHz frequency range.
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