Compact CMOS current conveyor for integrated NEMS resonators

This paper presents a fully-integrated NEMS resonator together with a compact built-in CMOS interfacing circuitry. The proposed low-power CCII circuit allows measuring the mechanical frequency response of the nanocantilever structure in the MHz range. Detailed experimental results at different DC biasing conditions and pressure levels are presented for a real mixed electro-mechanical system integrated through a combination of in-house standard CMOS technology and nanodevice postprocessing based on nanostencil lithography. The proposed read out circuit can be adapted to operate the nanocantilever in closed loop as a stand alone oscillator.