One-DOF Precision Position Control using the Combined Piezo-VCM Actuator

This paper presents the control performance of a highprecision positioning device using the hybrid actuator composed of a piezoelectric (PZT) actuator and a voice-coil motor (VCM). The combined piezo-VCM actuator features two main characteristics: a large operation range due to long stroke of the VCM, and high precision and heavy load positioning ability due to PZT impact force. A one-degree-of-freedom (DOF) experimental setup was configured to examine the fundamental characteristics, and the control performance was effectively demonstrated by using a switching controller. In rough positioning state, an integral variable structure controller (IVSC) was used for the VCM to conduct long range of operation; in precision positioning state, an impact force controller (IFC) for the PZT actuator coupled with presliding states of the sliding table was used to obtain high-precision position control and achieve both forward and backward actuations. The experimental results showed that the sliding table having a mass of 881g and with a preload of 10 N was successfully positioned within the positioning accuracy of 10 nm in both forward and backward position controls. Keywords—Integral variable structure controller (IVSC), impact force, precision positioning, presliding, PZT actuator, voice-coil motor (VCM).