Identification of Residual Stress State in an RF-MEMS Device
نویسندگان
چکیده
INTRODUCTION Microelectromechanical Systems (MEMS) are among the most significant technological advances of this decade. The objective of this technology is to manufacture " systems " whose dimensions are only a few hundred microns. Devices with applications ranging from drug delivery systems to telecommunications are currently under development. Their reduced size and weight give them unique advantages.
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