A micromachined surface stress sensor with electronic readout.

Controller design for a closed-loop micromachined accelerometer

This paper presents control strategies for the design of a digital closed-loop micromachined accelerometer. The microsystem is composed of a mechanical part sensitive to the external acceleration, and a fully integrated electronic part devoted to the readout and control. A feedback control approach was used from the beginning of the sensor design in order to reach a good trade-off between circu...

Diffraction-based Integrated Optical Readout for Micromachined Optomechanical Sensors

Energy-Efficient Sensing Concept for a Micromachined Yaw Rate Sensor

The need for micromechanical inertial sensors is increasing in future electronic stability control (ESC) and other positioning, navigation and guidance systems. Due to the rising density of sensors in automotive and consumer devices the goal is not only to get high performance, robustness and smaller package sizes, but also to optimize the energy management of the overall sensor system. This pa...

Leading-edge Vortices Control on a Delta Wing by Micromachined Sensors and Actuators

Instead of using conventional flaps to generate torques, we explore the feasibility of applying micromachined sensors and actuators to control leading-edge vortices, and consequently, provide sufficient moments for flight control. By utilizing a “flexible skin” containing 64 micromachined shear stress sensors, instantaneous separation line on the leading edges can be detected. We applied microa...

Design and Construction of a Sensitive Capasitive Sensor System (RESEARCH NOTE)

Design and construction of a capacitor sensor with a precise readout system are described in this paper. A variable air-gap capacitive transducer was constructed and for signalmeasurement a successful attempt was made to exploit the capacitance changes in terms of the phase angle of the detected signal. The reported setup makes it possible to detect capacitance changes of the order of 2.5 fF in...