Design and Analysis of the performance of a Torsional Micromirror for an Optical switching system
نویسندگان
چکیده
This paper describes the design and analysis of a particular micro-electromechanical-system (MEMS) micromirror device that can be used for an optical switching application. Analytical expressions for electrostatic torque and restoring torque of serpentine springs are derived. The performance of the proposed structure is compared with the existing structures having straight torsional beams. The design of the micromirror along wit h the serpentine springs is optimized for large scan angle. Sufficient details are provided to enable this device to be used as benchmark problem for coupled opto-electromechanical analysis.
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