Design of compact microwave plasma ion sources for focused ion beam
نویسندگان
چکیده
Two types of compact microwave plasma ion sources (MWPIS) for focused ion beam (FIB) have been developed. Cavity resonator type plasma ion source is subjected to make resonant electric field in order to ignite plasma efficiently. The optimum length of resonator and antenna, and position of quartz and antenna have been designed by both simple calculation and computer simulation. The other source consists of a cylindrical dielectric discharging chamber and an insulated co-axial antenna. To maximize electric field inside discharge chamber, both shape and length of antenna are determined. A magnet system is designed to provide the resonant magnetic field for electron cyclotron plasma.
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