Electrostatically Actuated 2-dimensional Mems Micromirror
نویسندگان
چکیده
Electrostatically actuated Micro-Electro-MechanicalSystems (MEMS) based micromirror is a fundamental building block for a variety of optical network applications, such as optical wavelength-selective switching, add/drop multiplexing, and optical cross-connecting. The design, analysis and testing of a 2-Dimensional (2D) electrostatically actuated torsional MEMS micromirror is presented in this paper. The dual-axis system has been modeled theoretically and the equations describing device behaviors are validated using numerical mathematical software MATHEMATICA. The static and dynamic behaviors of the double-gimbaled electrostatic torsional micromirror have been investigated using Finite Element Analysis (FEA) tools COMSOL and ANSYS. Prototype devices are fabricated using a standard surface micromachining MEMS process through the CMC Microsystems. Both the static and the dynamic testing results are discussed in the paper.
منابع مشابه
Dynamic and Static Pull-in instability of electrostatically actuated nano/micro membranes under the effects of Casimir force and squeezed film damping
In the current study, the effects of Casimir force and squeeze film damping on pull-in instability and dynamic behavior of electrostatically actuated nano and micro electromechanical systems are investigated separately. Linear elastic membrane theory is used to model the static and dynamic behavior of the system for strip, annular and disk geometries. Squeeze film damping is modeled using nonli...
متن کاملComparative Study of 2-DOF Micromirrors for Precision Light Manipulation
Many industry experts predict that the future of ber optic telecommunications depends on the development of all-optical components for switching of photonic signals from ber to ber throughout the networks. MEMS is a promising technology for providing all-optical switching at high speeds with signi cant cost reductions. This paper reports on the the analysis of two designs for 2-DOF electrostati...
متن کاملMicroelectromechanical Resonator-Based Components for Wireless Communications. Filters and Transmission Lines
Starting in the early 1960’s, when the integrated-circuit (IC) technology was developed, micromachining and microelectromechanical systems (MEMS) have grown into a broad research field with several commercial successes. Typical applications of MEMS are in physical, chemical and biochemical sensors, as well as in optical systems such as the digital micromirror device of Texas Instruments. From t...
متن کاملMechanical Behavior of an Electrostatically-Actuated Microbeam under Mechanical Shock
In this paper static and dynamic responses of a fixed-fixed microbeam to electrostatic force and mechanical shock for different cases have been studied. The governing equations whose solution holds the answer to all our questions about the mechanical behavior is the nonlinear elasto-electrostatic equations. Due to the nonlinearity and complexity of the derived equations analytical solution are ...
متن کاملInput-Shaping Control of Nonlinear MEMS
In general, microelectromechanical systems (MEMS) are excited using a nonlinear electrostatic field. Due to the nonlinearity, the frequency of the device response to a step input depends on the input magnitude. As a result, traditional shaping techniques which are based on linear theory fail to provide good performance over the whole voltage range. In this paper, we develop a new methodology fo...
متن کامل