Chapter 1- State of Artx
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چکیده
A micro-electro-mechanical system (MEMS) is a technology that allows obtaining components between 1 to 1000 micrometers (usually 20 micrometers). Its small dimension and, at the same time, the low power consumption, has become the most important features so as to develop a new technology for nano-scale components. Moreover, the fabrication procedures are as simple as a Microstrip line procedure. There are different types of MEMS depending on its applications; however, this paper is only focused on RF-MEMS.
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